Scope of the Workshop
The scope of the workshop is to bring together the scientific community working with focused electron beams as a tool for direct nanofabrication, through gas-assisted deposition and etching. The scientific program will focus on the recent advances and applications of the technique, along with the fundamental aspects of electron-molecule interaction process and precursor design. Windows on focused ion beam sibling technique will be also opened.
Topics
The scientific program will be focused on the following topics:
- e-/molecule interaction process
- New gas precursors’ design
- Modeling of deposition&etching process
- Deposition&etching fundamentals: new materials and methods, purification, characterization
- FEBIP applications in Magnetism, Photonics and Electronics
- 3D FEBID: fundamentals & applications
- Focused Ion beam (Ga, He) deposition